氟通四海 锂行天下 硅达五洲 硼程万里 智创未来
离子色谱仪
电感耦合等离子体质谱仪
中央取样柜 颗粒计数器
自动电位滴定仪
200L自动取样柜 自动充装线 200L自动充装线
◎ 产品介绍
电子化学品
电子级氢氟酸达到国际领先水平,电子级硝酸、电子级氨水、电子级氟化铵、
电子级双氧水品质满足半导体先进制程,逐渐形成年产20万吨电子化学品生产基
地。
浙江中宁硅业股份有限公司拥有国际上先进的硅烷生产工艺,国内唯一一家同
时进入半导体、液晶显示屏、光伏行业的硅烷生产厂家,是国内首家高纯硅烷以
及纳米硅粉的研发生产基地,拥有省级重点高纯硅材料研究院,主要产品有高纯
硅烷、乙硅烷、四氟化硅、氟氮混合气、纳米硅粉等产品,先后荣获国家专精特
新小巨人企业、国家高新技术企业。
多氟多同位素科技(河南)有限公司拥有国际先进、国内唯一高塔分离的硼同
位素全自动化工艺生产线。主营三氟化硼、硼-10酸、碳化硼等富集硼-10系列产
品;超纯三氟化硼-11、硼-11酸三乙酯等硼-11系列产品;氟化锂、四氟化硅等其
他富集同位素产品。
化验分析 电子化学品
运输
槽车
Y瓶
多晶硅
多氟多新材料股份有限公司是致力于氟、锂、硅、硼细分领域进行材料和能源体系研究及产业化的国家高新技术
企业。是全球规模领先、技术创新超前的无机氟新材料领军企业。荣获全国先进基层党组织、国家科技进步二等奖等
荣誉。是国家技术创新示范企业、国家知识产权示范企业。先后承担国家“863”计划、国家战略性新兴产业、国家工
业强基工程、增强制造业核心竞争力专项、国家产业基础再造工程等国家级项目30项。
公司主营业务为氟基新材料、新能源材料、电子信息材料和新能源电池,产品广泛应用于半导体集成电路、电动
汽车、电解铝、核工业、医疗等领域。
公司秉承“氟通四海、锂行天下、硅达五洲、硼程万里、智创未来”的发展使命,立志做全球氟材料行业引领
者,不断探求氟在人类生活和工业应用中的无限可能,为推动新能源产业绿色发展、半导体高端新材料国产化贡献智
慧。
氟通四海 锂行天下 硅达五洲 硼程万里 智创未来
www.dfdchem.com
高纯氢氟酸广泛应用于半导体、光伏行业。在集成电路制造中,高纯氢氟酸主要用于硅片的清洗、腐蚀。特别是使
用高纯氢氟酸清洗后,硅片表面能够较好地抑制自然氧化膜的生长,以利于得到质量更好的栅氧。
In the field of IC manufacture, the ultra pure HF is mainly used in the process of wafer cleaning and etching. . In particular,
after DHF (Diluted HF) cleaning, the wafer surface can slow down the growth of natural oxide, so as to get better gate
oxide in downstream step.
氢氟酸 / Hydrofluoric acid
30ft ISO Container
Size(L×W×H):9125×2438×2591mm
Input: DN100 valve
Qutput: DN80 ball valve
分子式HF,分子量20.01,为无色透明液体,相对密度1.15~1.18。能与一般金属、金属氧化物以及氢氧化物发生
反应生成各种盐类。腐蚀性极强,能侵蚀玻璃和硅酸盐而生成气态的四氟化硅。高纯氢氟酸为强酸性清洗、腐蚀
剂,可与硝酸、冰醋酸、双氧水及氢氟化铵等配制使用。
www.dfdchem.com
氢 氟 酸 质 量 指 标
Inspection Item Unit Guarantee Value
Assay
Color
Chloride (Cl)
Nitrate(NO )3
Sulfate(SO )4
Phosphate(PO )4
Lithium(Li)
Beryllium(Be)
Boron(B)
Sodium(Na)
Magnesium(Mg)
Aluminum(Al)
Potassium(K)
Calcium(Ca)
Titanium(Ti)
Vanadium(V)
Chromium(Cr)
Manganese(Mn)
Iron(Fe)
Cobalt(Co)
Nickel(Ni)
Copper(Cu)
Zinc(Zn)
Gallium(Ga)
Germanium(Ge)
Arsenic(As)
Strontium(Sr)
Zirconium(Zr)
Molybdenum(Mo)
Silver(Ag)
Cadmium(Cd)
Tin(Sn)
Antimony(Sb)
Barium(Ba)
Tantalum(Ta)
Tungsten(W)
Thalium(Tl)
Lead(Pb)
Bismuth(Bi)
Indium(In)
Platinum(Pt)
Gold(Au)
Niobium(Nb)
Palladium(Pd)
Thorium(Th)
Uranium(U)
Particles(≥0.3um)
Particles(≥0.2um)
%
Hazen
ppb
ppb
ppb
ppb
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
pcs/ml
pcs/ml
49.0±0.2
<5
≤1
≤1
≤3
≤3
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤10
≤20
www.dfdchem.com
超纯硝酸在集成电路工艺中通常应用于以下几个方面:1、与HF混合后用于腐蚀多晶硅薄膜;2、用于清洗硅片背
面的金属杂质;3、用于清洗扩散炉石英的部件等。
Ultra-purity HNO3 is usually applied in: 1. The mixture with HF is used to etch poly-silicon film; 2. It can remove metal
impurities on the backside of wafers; 3. It is used for cleaning quartz parts of the diffusion furnace and so on.
硝酸 / Nitric acid
30ft ISO Container
Size(L×W×H):9125×2438×2591mm
Input: DN100 valve
Qutput: DN80 ball valve
储存于阴凉、通风的库房。库温不超过30℃,相对湿度不超过80%。保持容器密封。应与还原剂、碱类、醇类、
碱金属等分开存放,切忌混储。
HNO3为无色透明液体,浓硝酸为淡黄色液体(溶有二氧化氮),正常情况下为无色透明液体。有窒息性刺激气
味。浓硝酸含量为68%左右,易挥发,在空气中产生白雾,是硝酸蒸汽和水蒸汽结合而形成的硝酸小液滴。相对
密度1.41,熔点-42℃(无水),沸点120.5℃(68%)。
www.dfdchem.com
Inspection Item
Assay
Lithium(Li)
Beryllium(Be)
Boron(B)
Sodium(Na)
Magnesium(Mg)
Aluminum(Al)
Potassium(K)
Calcium(Ca)
Titanium(Ti)
Vanadium(V)
Chromium(Cr)
Manganese(Mn)
Iron(Fe)
Cobalt(Co)
Nickel(Ni)
Copper(Cu)
Zinc(Zn)
Gallium(Ga)
Germanium(Ge)
Arsenic(As)
Strontium(Sr)
Zirconium(Zr)
Molybdenum(Mo)
Silver(Ag)
Cadmium(Cd)
Tin(Sn)
Antimony(Sb)
Barium(Ba)
Tantalum(Ta)
Tungsten(W)
Thalium(Tl)
Lead(Pb)
Bismuth(Bi)
Indium(In)
Platinum(Pt)
Gold(Au)
Niobium(Nb)
Particles(>0.3um)
Particles(>0.2um)
Unit
%
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
pcs/ml
pcs/ml
70±1
≤10
≤10
≤10
≤10
≤10
≤10
≤10
≤10
≤10
≤10
≤10
≤10
≤10
≤10
≤10
≤10
≤10
≤10
≤10
≤10
≤10
≤10
≤10
≤10
≤10
≤10
≤10
≤10
≤10
≤10
≤10
≤10
≤10
≤10
≤10
≤10
≤10
≤20
≤100
硝 酸 质 量 指 标
Guarantee Value
www.dfdchem.com
超净高纯级氢氧化铵为碱性清洗、腐蚀剂,可与过氧化氢、水、氢氟酸配制作为SC1使用,或者直接稀释后用于
Post CMP清洗,主要用于超大规模集成电路工艺技术的生产。
Ultra clean and high purity NH3H20 is a kind of alkaline cleaning and corrosive agent that can be used as SC1 with
hydrogen peroxide, water, and hydrofluoric acid, or directly diluted for Post CMP cleaning, mainly used in the
production of Very-large-scale integration process technology.
30ft ISO Container
Size(L×W×H):9125×2438×2591mm
Input: DN100 valve
Qutput: DN80 ball valve
氨水 / Ammonium hydroxide
3 NH4OH一般为无色透明且具有刺激性气味的液体,密度0.91g/cm ,沸点-33.34℃,极易挥发,对眼、鼻、皮肤
有刺激性和腐蚀性,在空气中最大容许浓度30mg/m3。
储存于阴凉、通风的库房。远离火种、热源。库温不宜超过30℃。保持容器密封。应与酸类、金属粉末等分开存
放,切忌混储。储区应备有泄漏应急处理设备和合适的收容材料。
FORMULA:NH40H CAS No. 1336-21-6
危险标记: 第8.2类,碱性腐蚀品
DIVISION OF CLASS : 8.2,corrosives presenting alkalinous properties
3 NH4OH It is a colorless, transparent and pungent liquid with a density of 0.91g / cm and a boiling point of-33.34 °c. it
is highly volatile, irritating and corrosive to eyes, nose and skin. The maximum allowable concentration of NH3H20
3
is 30mg / m in air.
It should be stored in a cool, well-ventilated warehouse, away from fire and heat. The temperature should not
exceed 30°C. Keep the container sealed. Be stored separately with acid, metal powder, etc. , do not mix storage.
The storage area shall be provided with leak emergency handling equipment and appropriate containment materials.
www.dfdchem.com
氨 水 质 量 指 标
Inspection Item
Assay
Lithium(Li)
Beryllium(Be)
Boron(B)
Sodium(Na)
Magnesium(Mg)
Aluminum(Al)
Potassium(K)
Calcium(Ca)
Titanium(Ti)
Vanadium(V)
Chromium(Cr)
Manganese(Mn)
Iron(Fe)
Cobalt(Co)
Nickel(Ni)
Copper(Cu)
Zinc(Zn)
Gallium(Ga)
Germanium(Ge)
Arsenic(As)
Strontium(Sr)
Zirconium(Zr)
Molybdenum(Mo)
Silver(Ag)
Cadmium(Cd)
Tin(Sn)
Antimony(Sb)
Barium(Ba)
Tantalum(Ta)
Tungsten(W)
Thalium(Tl)
Lead(Pb)
Bismuth(Bi)
Indium(In)
Platinum(Pt)
Gold(Au)
Niobium(Nb)
Palladium(Pd)
Particles(≥0.1um)
Particles(≥0.07um)
Unit
%
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
pcs/ml
pcs/ml
28.8-29.1
≤1
≤1
≤1
≤1
≤1
≤1
≤1
≤1
≤1
≤1
≤1
≤1
≤1
≤1
≤1
≤1
≤1
≤1
≤1
≤1
≤1
≤1
≤1
≤1
≤1
≤1
≤1
≤1
≤1
≤1
≤1
≤1
≤1
≤1
≤1
≤1
≤1
≤1
≤45
≤110
Guarantee Value
www.dfdchem.com
过氧化氢广泛应用于半导体、光伏、TFT面板行业。在集成电路制造过程中,主要用于太阳能硅片的蚀刻与清洗。
能够有效去除基板表面的杂质,提高产品的质量和产量。
Hydrogen peroxide is widely used in semiconductor, photovoltaic, TFT panel industry. In the integrated circuit
manufacturing process, it is mainly used for etching and cleaning solar silicon wafers. It can effectively remove the
impurities on the surface of the substrate and improve the quality and yield of the product.
过氧化氢/Hydrogen peroxide
分子式H2O2,分子量34.01,为无色透明液体,相对密度1.11。与可燃性物质接触会爆炸。与碱金属、钠、钙等活
泼金属接触发生反应而放出氢气。
运输中严禁受损、受热和雨淋,装卸中应该轻装、轻卸,防止撞击,并且贮存于通风良好的仓库中。
FORMULA H2O2 CAS NO. 7722-84-1
危险标记:5.1类,氧化剂
DIVISION OF CLASS 5.1, OXIDIZER
物化性质:PHYSICAL PROPERTIES
Formula is H2O2
, and molecular weight is 34.01, it is a kind of colorless and transparent liquid,and the relative
density is around 1.11. It contacts with flammable substances can cause an explosion. It reacts with active metals
such as alkali metals, sodium, and calcium to release hydrogen gas.
In the transportation, it should be carefuly uploaded and discharged, no crashing, no damage, no being heated and
out of the rain. It should be stored in the well ventilated warehouse.
30ft ISO Container
Size(L×W×H):9125×2438×2591mm
Input: DN100 valve
Qutput: DN80 ball valve
过 氧 化 氢 质 量 指 标
www.dfdchem.com
Inspection Item Unit Guarantee Value
Assay(H O ) 2 2
Color
TOC
PH
Free acids
Chloride(Cl)
Nitrogen compounds(NO )3
Sulphate(SO4)
Phosphate(PO4)
Silver(Ag)
Aluminum(Al)
Arsenic(As)
Gold(Au)
Barium(Ba)
Beryllium(Be)
Bismuth(Bi)
Calcium(Ca)
Cadmium(Cd)
Cobalt(Co)
Chromium(Cr)
Copper(Cu)
Iron(Fe)
Gallium(Ga)
Germanium(Ge)
Potassium(K)
Lithium(Li)
Magnesium(Mg)
Manganese(Mn)
Molybdenum(Mo)
Sodium(Na)
Nickel(Ni)
Lead(Pb)
Platinum(Pt)
Antimony(Sb)
Tin(Sn)
Strontium(Sr)
Titanium(Ti)
Vanadium(V)
Zinc(Zn)
Indium(In)
Boron(B)
Zirconium(Zr)
Niobium(Nb)
Palladium(Pd)
Tantalum(Ta)
Tungsten(W)
Thallium(Tl)
Particle(≥0.2μm)
Particle(≥0.1μm)
Particle(≥0.03μm)
%
Hazen
ppm
/
ppm
ppb
ppb
ppb
ppb
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
pcs/ml
pcs/ml
pcs/ml
30.5-31.5
<10
≤5
3.5-4.5
≤10
≤10
≤10
≤10
≤10
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤10
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤10
≤50
≤200
www.dfdchem.com
在晶圆淀积中,氟化铵用于制造工艺的降低表面张力以及促使表面更容易吸附精细晶圆的滚轮涂敷程序中。
In wafer deposition, NH4F is used in the roller coating program to reduce surface tension in manufacturing
processes and facilitate easier surface adsorption of fine wafers.
氟化铵/Ammonium fluoride
3 NH4F为无色无味液体,密度为1.009g/cm (40%浓度,20℃),PH为6(酸性,20℃)。产品不易燃,遇酸分解,放
出腐蚀性的氟化氢气体。遇碱放出有刺激性的氨。受高热分解产生有毒的腐蚀性烟气。吞咽可中毒,皮肤接触可中
毒。吸入可中毒。
存放在阴凉、通风、干燥处,保持容器密闭。远离热源、热表面、火花、明火和其他点火源。200升桶装或者罐式
集装箱。仓库应配备合适的意外泄露收集设备及消防设备。
CHEMICAL FORMULA:NH4F CAS NO: 12125-01-8
危险标记:6.1(有毒 )
DIVISION OF CLASS :6.1 (TOXIC )
3 NH4F is aColorless and odorless liquid.Density1.009g/cm (40% concentration, 20°C), PH 6 (acidic, 20°C).The
product is not flammable. It breaks down with acid,releasing corrosive hydrogen fluoride gas.It breaks down with
alkali,releasing irritating ammonia.Toxic and corrosive smoke is produced by high thermal decomposition. Toxic if
swallowed.Toxic by skin contact. Toxic by inhalation.
Store in a cool, ventilated, dry place and keep the container airtight. Keep away from heat sources, hot surfaces,
sparks, open flames, and other sources of ignition.200L drum and tank.The storeroom should be equipped with
proper facilities for accidental leakage and fire.
www.dfdchem.com
Inspection Item
Assay
HF
Ag
Al
As
Au
B
Ba
Be
Bi
Ca
Cd
Co
Cr
Cu
Fe
Ga
Ge
K
Li
Mg
Mn
Mo
Na
Nb
Ni
Pb
Sb
Sn
Sr
Ta
Ti
Tl
W
Zn
Zr
Unit
%
%
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
ppt
Guarantee Value
40.35±0.1
0-0.03
<1
<4
<4
<3
<2
<2
<3
<1
<8
<1
<2
<3
<3
<4
<2
<3
<3
<2
<3
<3
<2
<4
<2
<3
<1
<2
<1
<1
<2
<3
<1
<2
<3
<4
氟 化 铵 质 量 指 标
www.cn-silicon.com.cn
硅烷作为一种提供硅组分的气体源,广泛应用于微电子、光电子工业,用于制造太阳电池、平板显示器、玻璃和钢
铁镀层。
Silane as a gas source that provides silicon components, is widely used in microelectronics and optoelectronics industry. It
is used to make solar cells, flat panel displays, glass and iron and steel coatings.
甲硅烷 / Silane
CHEMICAL FORMULA:SIH4 CAS No. 7803-62-5
危险标记: 第2.1类,易燃气体
DIVISION OF CLASS : 2.1, flammable gas
分子式SiH4,分子量32.12,为无色透明气体,密度1.44g/L(0℃, 1bar) ,与空气混合能形成爆炸性混合物。遇明
火、高热极易燃烧爆炸。暴露在空气中能自燃。与氟、氯等接触会发生剧烈的化学反应。
Formula is SiH4, and molecular weight of 32.12, is a colorless transparent gas with a density of 1.44g/L (0 C, 1bar), which
can form an explosive mixture with air mixture. It is easy to burn and explode in a clear fire and high heat. Exposure to air
can be self igniting. Intense chemical reactions occur in contact with fluorine and chlorine.
运送过程中,钢瓶和容器必须接地和跨接,防止产生静电。搬运时轻装轻卸,防止钢瓶及附件破损。储存于阴凉、
干燥、通风良好的库房。远离火种、热源。钢瓶温度不超过52℃。保持容器密封。
In the course of delivery, the cylinders and containers must be grounded and straddled to prevent the generation of static
electricity. Light and light unloading when handling, prevent steel bottles and accessories from breakage. Store in a cool,
dry, well ventilated storeroom. Stay away from fire and heat. The temperature of the cylinder is not more than 52 degrees
C. Keep the container seal.
Y瓶/125kG D瓶/12KG ISO长管拖车/2400KG
www.cn-silicon.com.cn
Inspection Item Unit Guarantee Value
%
ppm
ppm
ppm
ppm
ppm
ppm
ppm
ppm
ppm
ppm
ppm
ppm
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
99.9999~100
0.5
0.05
0.05
0.05
0.1
0.05
0.1
0.1
0.1
0.1
0.3
20
0.02
0.005
0.02
0.02
0.005
0.02
0.02
1
Silane(SiH4)
Nitrogen(N2)
Oxygen /Argon(O2/Ar)
Carbon Monoxide(CO)
CarbonDioxide(CO2)
Chloride(Cl)
Methane(CH4)
Hydrocarbon(C2-C4)
Moisture(H2O)
Disiloxane(Si2H6O)
Methyl silane(CH3SiH3)
Disilane(Si2H6)
Hydrogen(H2)
Aluminum(Al)
Antimony(Sb)
Arsenic(As)
Gallium(Ga)
Indium(In)
Boron(B)
Phosphorus(P)
Fe+Cr+Ni+Cu+Zn
甲 硅 烷 质 量 指 标
Add:浙江省衢州市高新技术产业园区华荫北路27号
NO.27,Huayin North Road,High-Tech Industrial Park QuZhou,ZheJiang Province,China 324000.
http://www.cn-silicon.com.cn
www.cn-silicon.com.cn
氟气是精细化工领域的重要原料,广泛应用于电子、激光技术、医药塑料等领域。由于它的强氧化性,可以用于玻
璃浸蚀、金属材料、管道的表面钝化处理,在国防上用于制取火箭推进剂。氟气还用于电子、医药、卫生、科研等
领域。
Fluorine gas is an important raw material in the field of fine chemicals, widely used in fields such as electronics, laser technology,
pharmaceutical plastics, etc. Due to its strong oxidizing properties, it can be used for surface passivation treatment of glass etching,
metal materials, and pipelines, and in the production of rocket propellants in national defense. Fluorine gas is also used in fields such
as electronics, medicine, health, and scientific research.
氟氮混合气/ Fluorine-nitrogen mixture
CHEMICAL FORMULA:20%F2
/N2
CAS NO:7782-41-4
危险标记:2.3类(有毒气体)
DIVISION OF CLASS :2.3 (TOXIC GASES)
氟氮混合气是一种极活泼,具有很强的吸水性、强腐蚀性的气体,能与碱、金属、氧化物以及硅酸盐(能腐蚀玻璃
和破坏其他含硅物质,)等反应,在一定条件下能与水自由混合成氢氟酸(溶于水时激烈放热而成氢氟酸)。
20%F /N is an extremely active, highly absorbent, and corrosive gas that can react with alkalis, metals, oxides, and silicates (which 2 2
can corrode glass and destroy other siliceous substances). Under certain conditions, it can freely mix with water to form hydrofluoric
acid (which is formed by intense heat release when dissolved in water).
储存于阴凉、通风仓间内。仓内温度不宜超过40℃。远离火种热源。防止
阳光直射。应与易燃物、金属粉末、氧等氧化剂严格分开存放。验收时要
注意品名,注意验瓶日期,先进仓的先发用。搬运时轻装轻卸,防止钢瓶
及附件破损。不得分装。钢瓶阀门操作必须使用标准的手轮。
Store in a cool and ventilated warehouse. The temperature inside the warehouse
should not exceed 40℃. Keep away from ignition and heat sources. Prevent direct
sunlight. It should be strictly stored separately from inflammable, metal powders,
oxygen and other oxidizing agents. During acceptance, attention should be paid to the
product name, bottle inspection date, and the ones in the first warehouse should be
used first. During transportation, load and unload with care to prevent damage to steel
cylinders and accessories. Do not pack separately. Standard handwheels must be
used for cylinder valve operation.
www.cn-silicon.com.cn
2 0 % F 2
/ N 2 (氟 氮 混 气)
Add:浙江省衢州市高新技术产业园区华荫北路27号
NO.27,Huayin North Road,High-Tech Industrial Park QuZhou,ZheJiang Province,China 324000.
http://www.cn-silicon.com.cn
Material Name(材料名称)
Packaging(包装)
Package Quantity (包装数量)
Valve(阀门型号)
Valve Body Material(阀门本体材质)
Cylinder material(钢瓶材质)
Shelf Life Requirements(保质期)
20%F2/N2
DOT
DOT(47L) MAX:5.0Mpa /瓶
DISS728
SUS316L
Mn Steel(锰钢)
24 Months(24 个月)
项 目
氟气( -2 F )纯度(摩尔分数)/10
氮气( -2 N )含量(摩尔分数)/10
氟气( -2 F )浓度(百分比)/10
一氧化碳( -6 CO)含量(摩尔分数)/10
二氧化碳( -6 CO )含量(摩尔分数)/10
四氟化碳( -6 CF )含量(摩尔分数)/10
氟化氢( -6 HF)含量(摩尔分数)/10
氧+氩( -6 O +Ar)含量(摩尔分数)/10
四氟化硅( -6 SiF )含量(摩尔分数)/10
指 标
≥99.998
≥99.9999
20±0.5
≤25.0
≤25.0
≤20.0
≤100.0
≤100.0
≤50.0
www.cn-silicon.com.cn
四氟化硅作为一种提供氟硅组分的气体源,广泛应用于氟硅酸、氟化铅的制取,也用作水泥和人造大理石的硬化剂
及有机硅化合物的合成材料。
Silicon tetrafluoride is widely used in the preparation of fluorosilicic acid and lead fluoride. It is also used as a hardener for cement
and artificial marble and as a synthetic material for organosilicon compounds.
四氟化硅/Silicon tetrafluoride
CHEMICAL FORMULA:SiF4
CAS NO: 7783-61-1
危险标记:6(有毒气体),20(腐蚀品)
DIVISION OF CLASS :6 (POISONOUS GAS), 20 (CORROSIVE SUBSTANCE)
分子式SiF4,分子量104.06,为无色刺激性气体,密度4.67g/L(0℃,1bar) ,易潮解。在潮湿的空气中生成氟化氢
浓烟雾。
Molecular formula SiF , molecular weight 104.06, it is a colorless pungent gas, the density is 4.67g/L(0, 1bar), easy to deliquesce, 4
and it will be to generate hydrogen fluoride smoke in humid air .
运送过程中,钢瓶和容器必须接地和跨接,防止产生静电。搬运时轻装轻卸,防
止钢瓶及附件破损。储存于阴凉、干燥、通风良好的库房。远离火种、热源。应与
酸类、食用化学品分开存放。钢瓶温度不超过52℃。保持容器密封。
Cylinders and containers must be grounded and bridged during shipment to prevent static
electricity. Lightly load and unload during handling to prevent damage to cylinders and
accessories. Store in a cool, dry, well-ventilated warehouse. Keep away from fire and heat. It
should be stored separately from acids and food chemicals. The temperature of the cylinder
does not exceed 52 °C. Keep the container sealed.
SIF4Transport vehicle
SIF4 Package
www.cn-silicon.com.cn
四 氟 化 硅 质 量 指 标
Add:浙江省衢州市高新技术产业园区华荫北路27号
NO.27,Huayin North Road,High-Tech Industrial Park QuZhou,ZheJiang Province,China 324000.
http://www.cn-silicon.com.cn
Inspection Item Unit Guarantee Value
%
ppm
ppm
ppm
ppm
ppm
ppm
ppm
ppm
99.999~100
4.0
0.5
0.1
0.3
0.1
0.1
0.1
1
Add:浙江省衢州市高新技术产业园区华荫北路27号
NO.27,Huayin North Road,High-Tech Industrial Park QuZhou,ZheJiang Province,China 324000.
http://www.cn-silicon.com.cn
silicon tetrafluoride(SiF4)
Nitrogen(N2)
Oxygen /Argon(O2
/Ar)
Carbon Monoxide(CO)
CarbonDioxide(CO2)
Methane(CH4)
Hydrogen sulfide(H2S)
Sulfur dioxide(SO2)
Cr/Mn/Fe/Co/Ni/Cu/Mo/Li/Na/Mg/Al/K/Ca
www.cn-silicon.com.cn
在半导体工艺中用于外延和扩散工艺,也可应用于非晶硅膜、外延成长、氧化膜、氮化膜、化学气相淀积等方面。
Used in semiconductor processes for epitaxial and diffusion processes, as well as in amorphous silicon films, epitaxial growth, oxide
films, nitride films, chemical vapor deposition, and other fields.
CHEMICAL FORMULA:Si2H6 CAS NO: 1590-87-0
危险标记:2.1(易燃气体)
DIVISION OF CLASS :2.1 (FLAMMABLE GAS)
乙硅烷是一种无机化合物,其化学式为Si2H6,在常温常压下为无色透明具有不愉快刺激臭的有毒气体,在自身蒸
汽压下是无色透明液体。乙硅烷气体可以与氢气、氩气、氮气、氦气等以任意比例混合可溶于二硫化碳、乙基醇、
苯和乙基硅酸。
Si H is a inorganic compound with the chemical formula of Si H . It is a colorless transparent toxic gas with unpleasant odor under 2 6 2 6
normal temperature and pressure, and a colorless transparent liquid under its own vapor pressure. Ethylsilane gas can be mixed with
hydrogen, argon, nitrogen, helium, and other gases in any ratio and is soluble in carbon disulfide, ethyl alcohol, benzene, and ethyl
silicic acid.
运送过程中,钢瓶和容器必须接地和跨接,防止产生静电。搬运时轻装轻
卸,防止钢瓶及附件破损。储存于阴凉、干燥、通风良好的库房。远离火
种、热源。钢瓶温度不超过52℃。保持容器密封,乙硅烷比硅烷更不稳
定,所以,钢瓶温度不能冷却到乙硅烷的沸点(-14.3℃)以下。
During transportation, steel cylinders and containers must be grounded and cross
connected to prevent the generation of static electricity. During transportation, load and
unload with care to prevent damage to steel cylinders and accessories. Store in a cool,
dry, and well ventilated warehouse. Keep away from sparks and heat sources. The
temperature of the steel cylinder shall not exceed 52 ℃. Keep the container sealed.
Ethylene silane is more unstable than silane, so the cylinder temperature cannot be
cooled below the boiling point of ethylene silane (-14.3 ℃).
乙硅烷/ Disilane
www.cn-silicon.com.cn
乙 硅 烷 质 量 指 标
Inspection Item Unit Guarantee Value
Disilane Purity
Nitrogen (N )2
Oxygen+Argon(O2+Ar)
Hydrogen(H2)
Water(H2O)
Carbon Monoxide(CO)
Carbon dioxide(CO2)
Methane(CH4)
Silane(SiH4)
Triethylsilane(Si3H8)
Chlorsilanes
higher silanes
siloxane
Ferrum(Fe)
Nickel(Ni)
Chromium(Cr)
Copper(Cu)
Calcium(Ca)
Sodium(Na)
Zinc(Zn)
Aluminum(Al)
Manganese(Mn)
Magnesium(Mg)
Potassium(K)
Arsenic(As)
Barium(Ba)
Beryllium(Be)
Cobalt(Co)
Gallium(Ga)
Germanium(Ge)
Indium(In)
Lithium(Li)
Molybdenum(Mo)
Lead(Pb)
Tin(Sn)
Tungsten(W)
Antimony(Sb)
Boron(B)
Phosphorus(P)
Cadmium(Cd)
%
ppm
ppm
ppm
ppm
ppm
ppm
ppm
ppm
ppm
ppm
ppm
ppm
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
>99.998
≤0.50
≤0.02
≤18
≤0.5
≤0.2
≤0.2
≤0.2
≤80
≤10
≤0.20
≤50
≤2
≤0.15
≤0.15
≤0.01
≤0.02
≤0.15
≤0.15
≤0.02
≤0.01
≤0.02
≤0.15
≤0.15
≤0.005
≤0.005
≤0.005
≤0.005
≤0.005
≤0.005
≤0.005
≤0.005
≤0.005
≤0.005
≤0.005
≤0.005
≤0.005
≤0.02
≤0.02
≤0.005
Add:浙江省衢州市高新技术产业园区华荫北路27号
NO.27,Huayin North Road,High-Tech Industrial Park QuZhou,ZheJiang Province,China 324000.
http://www.cn-silicon.com.cn
www.cn-silicon.com.cn
用于半导体外延生长、硅化物沉积、浅结掺杂,可作为硅源气体,应用于先进芯片的薄膜沉积与半导体器件制造。
Used for semiconductor epitaxial growth, silicide deposition, and shallow junction doping. As a silicon source gas, it is applied in thinfilm deposition and advanced semiconductor device manufacturing.
CHEMICAL FORMULA:SiH2CL CAS NO:13456-71-9
危险标记:2. 1(易燃气体)
DIVISION OF CLASS:2.1 (FLAMMABLE GAS)
分子式: 3 SiH?Cl,分子量:66.56,气体密度约 1.18 kg/m 。无色易燃气体,有刺激性,遇水剧烈反应,极易
燃、剧毒、强腐蚀性。
Molecular formula: SiH?Cl, Molecular weight: 66.56, Density: 1.18 kg/m3. Colorless flammable gas with pungent odor, reacts violently
with water, extremely flammable, toxic and corrosive.
运送应储存在阴凉、干燥、通风良好的专用库房,远离火源、热源及氧化剂,严禁受潮。采用耐压钢瓶密封包装,
避免碰撞、暴晒,钢瓶需直立固定并接地。严禁与水、酸、碱、氧化剂混储混运,库温不宜过高,配备防爆消防设
施,操作人员需专业防护。
Store in a cool, dry, well-ventilated warehouse, away from ignition, heat and oxidizers. Keep dry. Use pressure-resistant cylinders,
avoid impact and direct sunlight. Cylinders must be secured upright and grounded. Do not store or transport with water, acids, alkalis
or oxidizers. Equip with explosion-proof facilities.
一氯硅烷/ Monochlorosilane
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一氯硅烷质量指标
Add:浙江省衢州市高新技术产业园区华荫北路27号
NO.27,Huayin North Road,High-Tech Industrial Park QuZhou,ZheJiang Province,China 324000.
http://www.cn-silicon.com.cn
Inspection Item Unit Guarantee Value
%
ppmv
ppmv
ppmv
ppmv
ppmv
ppmv
ppmv
ppmv
≥99.99
<20
<40
<20
<0.1
<0.1
<0.1
<0.1
<0.1
Add:浙江省衢州市高新技术产业园区华荫北路27号
NO.27,Huayin North Road,High-Tech Industrial Park QuZhou,ZheJiang Province,China 324000.
http://www.cn-silicon.com.cn
SiH3Cl Purity
Trichlorosilane(SiHCl3)
Dichlorosilane(SiH2Cl2)
Silane(SiH )4
Oxygen+Argon (O +Ar) 2
Nitrogen (N )2
Carbon Monoxide (CO)
Carbon Dioxide (CO )2
THC
www.cn-silicon.com.cn
作为硅源广泛用于硅外延、氧化硅、氮化硅薄膜制备,是集成电路、功率器件、晶圆制造中的关键电子特气。
Widely used as a silicon source for silicon epitaxy, SiO? and Si?N? thin-film preparation. It is a critical electronic gas for integrated
circuits, power devices, and wafer fabrication.
CHEMICAL FORMULA:SiH?Cl? CAS NO:4109-96-0
危险标记:2. 1(易燃气体)
DIVISION OF CLASS:2.1 (FLAMMABLE GAS)
分子式:SiH 3
?Cl?,分子量:101.01,气体密度约 3.69 kg/m 。无色易燃气体,遇水剧烈反应放热,剧毒、强腐蚀
性。
Molecular formula: SiH Cl , Molecular weight: 101.01, Density: 3.69 kg/m3. Colorless flammable gas, reacts violently with water to 2 2
release heat and corrosive acid mist, highly toxic and corrosive.
储存于阴凉、干燥、防爆通风处,严禁进水、受潮。包装为高压专用气瓶,密封可靠,防止泄漏。远离火种、热
源、氧化剂及腐蚀性物质,库温严格控制。气瓶直立固定,严禁滚动、撞击。分区存放,严禁与食品、饲料混储,
配备泄漏应急处理设备。
Store in cool, dry, explosion-proof and ventilated area. Keep away from water, moisture, ignition, heat and oxidizers. Packaged in
high-pressure cylinders with reliable sealing. Cylinders upright fixed, no rolling or impact. Separate storage, no mixing with food or
feed. Equip with emergency leakage equipment.
二氯硅烷/ Dichlorosilane
www.cn-silicon.com.cn
Inspection Item Unit Guarantee Value
SiH2Cl2 Purity
Oxygen+Argon (O +Ar) 2
Nitrogen (N )2
Carbon Monoxide (CO)
Carbon Dioxide (CO )2
Trichlorosilane(SiH3Cl)
Silicon Tetrachloride(SiCl4)
Boron (B)
Phosphorus (P)
Resistivity (N-type)
C1-C3
Trichlorosilane(SiHCl3)
Aluminum (Al)
Arsenic (As)
Calcium (Ca)
Cadmium (Cd)
Chromium (Cr)
Copper (Cu)
Ferrum (Fe)
Potassium (K)
Manganese (Mn)
Sodium (Na)
Titanium(Ti)
Zinc (Zn)
Lead (Pb)
Magnesium (Mg)
Molybdenum (Mo)
Nickel (Ni)
Lithium (Li)
Cobalt (Co)
Antimony (Sb)
Tungsten (W)
Barium (Ba)
Tin (Sn)
Vanadium(V)
Strontium(Sr)
Platinum(Pt)
Particle(>=0.1um)
%
ppm
ppm
ppm
ppm
%
%
ppbw
ppbw
Ω·cm
ppm
%
ppbw
ppbw
ppbw
ppbw
ppbw
ppbw
ppbw
ppbw
ppbw
ppbw
ppbw
ppbw
ppbw
ppbw
ppbw
ppbw
ppbw
ppbw
ppbw
ppbw
ppbw
ppbw
ppbw
ppbw
ppbw
Pcs/L
>99.99
≤0.05
≤0.5
≤0.1
≤0.1
≤0.0015
≤0.0040
≤0.0025
≤0.01
≤500
≤0.5
≤0.0040
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
≤5
二 氯 硅 烷 质 量 指 标
Add:浙江省衢州市高新技术产业园区华荫北路27号
NO.27,Huayin North Road,High-Tech Industrial Park QuZhou,ZheJiang Province,China 324000.
http://www.cn-silicon.com.cn
www.cn-silicon.com.cn
主要用于生产高纯多晶硅、单晶硅,也用于外延、化学气相沉积(CVD),是半导体硅片与光伏产业核心原料。
Mainly used to produce high-purity polycrystalline and monocrystalline silicon. Also applied in epitaxy and CVD; it is a core raw
material for semiconductor wafers and PV industry.
CHEMICAL FORMULA:SiH3CL CAS NO:77-90-7
危险标记:3(易燃液体)
DIVISION OF CLASS:2.1 (FLAMMABLE GAS)
分子式: 3 SiHCl?,分子量:135.45,液体密度1.34g/cm 。无色易挥发液体,遇水剧烈水解,放出易燃气体,高
度易燃、有毒、强腐蚀。
Molecular formula: SiHCl?, Molecular weight: 135.45, Density: 1.34 g/cm3. Colorless volatile liquid, hydrolyzes violently with water to
release flammable gas, highly flammable, toxic and corrosive.
储存于阴凉、干燥、通风的耐腐蚀库房,远离火源、热源、氧化剂及水。采用防爆、耐腐蚀密封容器或钢瓶包装,
避光、避热,防止静电与碰撞。严禁与水接触,地面做防腐蚀处理,配备泄漏吸收、防爆及消防器材,实行专人管
理。
Store in cool, dry, ventilated and corrosion-resistant warehouse, away from fire, heat, oxidizers and water. Use explosion-proof,
corrosion-resistant sealed containers or cylinders. Avoid light, heat, static and impact. Grounding required. Equip with leakage
control, explosion-proof and fire-fighting equipment.
三氯硅烷/ Trichlorosilane
www.cn-silicon.com.cn
Inspection Item Unit Guarantee Value
%
%
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppm
Ω·cm
≥99.99%
≤0.01
≤0.08
≤0.05
≤0.1
≤0.1
≤0.1
≤0.5
≤0.1
≤0.1
≤0.5
≤0.05
≤0.1
≤0.1
≤0.1
≤0.1
≥1000
SiHCl3 Purity
Other chlorosilanes
Phosphorus+Arsenic(P+As)
Boron (B)
Aluminum (Al)
Chromium (Cr)
Copper (Cu)
Ferrum (Fe)
Nickel (Ni)
Zinc (Zn)
Calcium (Ca)
Cobalt (Co)
Manganese (Mn)
Vanadium(V)
Molybdenum (Mo)
Carbon (C)
Resistivity
三 氯 硅 烷 质 量 指 标
Add:浙江省衢州市高新技术产业园区华荫北路27号
NO.27,Huayin North Road,High-Tech Industrial Park QuZhou,ZheJiang Province,China 324000.
http://www.cn-silicon.com.cn
www.cn-silicon.com.cn
用作半导体沉积硅源,用于低介电常数薄膜、氮化硅、氧化硅及钝化层制备,广泛应用于集成电路、先进封装与半
导体器件制造。
Used as silicon source for semiconductor deposition, for preparing low-k films, SiN, SiO? and passivation layers. Widely applied in
integrated circuits, advanced packaging and semiconductor device manufacturing.
CHEMICAL FORMULA:C?H??Si CAS NO:75-76-3
危险标记:2. 1(易燃气体)
DIVISION OF CLASS:2.1 (FLAMMABLE GAS)
分子式:C 3
?H??Si,分子量:74.20,气体密度约 0.0047 g/cm (0℃, 1 atm)。无色易燃气体,有特殊气味,遇
水缓慢反应,极易燃,具刺激性与窒息性。
Molecular formula: C?H??Si, Molecular weight: 74.20, Density: 0.0047 g/cm3 (0, 1 atm).Colorless flammable gas with characteristic
odor, reacts slowly with water, extremely flammable, irritating and asphyxiant.
运送储存在阴凉、通风、防火防爆专用仓库,远离热源、火花、静电及氧化剂。以耐压气瓶密封包装,直立固定,
防止倾倒、撞击与暴晒。严禁与水、空气长时间接触,库温控制在安全范围,配备防爆通风与消防装置,严禁无关
人员进入。
Store in cool, ventilated, fire and explosion-proof warehouse, away from heat, sparks, static and oxidizers. Use pressure-resistant
cylinders, secured upright to prevent falling, impact or sunlight. Avoid prolonged contact with water or air. Control temperature and
equip with explosion-proof ventilation.
三甲基硅烷/ Trimethylsilane
www.cn-silicon.com.cn
Inspection Item Unit Guarantee Value
C3H10Si Purity
Nitrogen(N2)
Carbon Dioxide(CO2)
Carbon Monoxide(CO)
Oxygen+Argon(O2+Ar)
Total hydrocarbons (as methane CH )4
Trichlorosilane(SiH3Cl)
Water(H2O)
Silver(Ag)
Aluminum(Al)
Gold(Au)
Boron(B)
Barium(Ba)
Bismuth(Bi)
Calcium(Ca)
Cobalt(Co)
Chromium(Cr)
Copper(Cu)
Ferrum(Fe)
Gallium(Ga)
Indium(In)
Potassium(K)
Lithium(Li)
Magnesium(Mg)
Manganese(Mn)
Sodium(Na)
Nickel(Ni)
Lead(Pb)
Tin(Sn)
Thorium(Th)
Thallium(Tl)
Uranium(U)
Tungsten(W)
Zinc(Zn)
Arsenic(As)
%
ppmv
ppmv
ppmv
ppmv
ppmv
ppmv
ppmv
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
ppb
>99.999
≤1
≤1
≤2
≤2
≤1
≤1
≤1
≤0.2
≤0.2
≤0.2
≤0.2
≤0.2
≤0.2
≤0.2
≤0.2
≤0.2
≤0.2
≤0.2
≤0.2
≤0.2
≤0.2
≤0.2
≤0.2
≤0.2
≤0.2
≤0.2
≤0.2
≤0.2
≤0.2
≤0.2
≤0.2
≤0.2
≤0.2
≤0.2
三 甲 基 硅 烷 质 量 指 标
Add:浙江省衢州市高新技术产业园区华荫北路27号
NO.27,Huayin North Road,High-Tech Industrial Park QuZhou,ZheJiang Province,China 324000.
http://www.cn-silicon.com.cn
www.cn-silicon.com.cn
作为高纯硅源、碳源气体,用于碳化硅半导体CVD沉积、碳化硅外延生长、低介电常数薄膜与钝化层制备,应用
于先进集成电路、功率器件及晶圆制造工艺。
As a high-purity silicon and carbon source gas, it is used for CVD deposition, epitaxial growth and silicon carbide coating of silicon
carbide (SiC) semiconductors, as well as the preparation of low-k dielectric films and passivation layers. It is applied in advanced
integrated circuits, power devices and wafer manufacturing processes.
CHEMICAL FORMULA:SiH3CL CAS NO:992-94-9
危险标记:2. 1(易燃气体)
DIVISION OF CLASS:2.1 (FLAMMABLE GAS)
分子式:CH 3
6Si,分子量:46.16,气体密度:1.65kg/m (25℃,1atm)。无色易燃气体,无臭,极易燃,可与
空气形成爆炸性混合物,遇水缓慢反应,化学性质活泼。
Molecular formula: CH6Si, Molecular weight: 46.16, Gas density: 1.65 kg/m3 (25 ,1atm).Colorless flammable gas, odorless,
extremely flammable, forms explosive mixtures with air, reacts slowly with water, chemically reactive.
应储存在阴凉、干燥、通风良好的防爆专用库房,远离火源、热源、静电及强氧化剂,库温控制在安全范围。采用
高压无缝钢瓶密封包装,钢瓶直立固定,防止倾倒、碰撞与暴晒,做好接地防静电。严禁与水、酸、碱、氧化剂混
储,配备泄漏应急及防爆消防设施。
Store in a cool, dry, well-ventilated explosion-proof warehouse, away from ignition sources, heat, static electricity and strong
oxidizers, with safe temperature control. Sealed in high-pressure seamless cylinders, fixed upright to prevent tipping, impact and
direct sunlight, grounded for anti-static. Do not store with water, acids, alkalis or oxidizers. Equipped with leakage emergency and
explosion-proof fire equipment.
甲基硅烷/ Methylsilane
www.cn-silicon.com.cn
甲 基 硅 烷 质 量 指 标
Add:浙江省衢州市高新技术产业园区华荫北路27号
NO.27,Huayin North Road,High-Tech Industrial Park QuZhou,ZheJiang Province,China 324000.
http://www.cn-silicon.com.cn
Inspection Item Unit Guarantee Value
%
ppmv
ppmv
ppmv
ppmv
ppmv
ppmv
ppmv
ppmv
≥99.99
≤20
≤10
≤2
≤1
≤2
≤1
≤50
≤5
Methylsilane SiH CH ) 3 3
Silane SiH4
Nitrogen (N )2
Carbon dioxide(CO2)
Oxygen+Argon(O2+Ar)
Methane(CH4)
Water(H2O)
Other methylsilanes
Chlorosilane
www.dfdchem.com
高丰度硼-10酸
www.dfdchem.com
高丰度硼-11系列产品
硼-11酸三乙酯
www.dfdchem.com
高丰度同位素产品
www.dfdchem.com
离子色谱仪
电感耦合等离子体质谱仪
中央取样柜 颗粒计数器
自动电位滴定仪
200L自动取样柜 自动充装线 200L自动充装线
◎ 产品介绍
电子化学品
电子级氢氟酸达到国际领先水平,电子级硝酸、电子级氨水、电子级氟化铵、
电子级双氧水品质满足半导体先进制程,逐渐形成年产20万吨电子化学品生产基
地。
浙江中宁硅业股份有限公司拥有国际上先进的硅烷生产工艺,国内唯一一家同
时进入半导体、液晶显示屏、光伏行业的硅烷生产厂家,是国内首家高纯硅烷以
及纳米硅粉的研发生产基地,拥有省级重点高纯硅材料研究院,主要产品有高纯
硅烷、乙硅烷、四氟化硅、氟氮混合气、纳米硅粉等产品,先后荣获国家专精特
新小巨人企业、国家高新技术企业。
多氟多同位素科技(河南)有限公司拥有国际先进、国内唯一高塔分离的硼同
位素全自动化工艺生产线。主营三氟化硼、硼-10酸、碳化硼等富集硼-10系列产
品;超纯三氟化硼-11、硼-11酸三乙酯等硼-11系列产品;氟化锂、四氟化硅等其
他富集同位素产品。
化验分析 电子化学品
运输
槽车
Y瓶
多晶硅
多氟多新材料股份有限公司是致力于氟、锂、硅、硼细分领域进行材料和能源体系研究及产业化的国家高新技术
企业。是全球规模领先、技术创新超前的无机氟新材料领军企业。荣获全国先进基层党组织、国家科技进步二等奖等
荣誉。是国家技术创新示范企业、国家知识产权示范企业。先后承担国家“863”计划、国家战略性新兴产业、国家工
业强基工程、增强制造业核心竞争力专项、国家产业基础再造工程等国家级项目30项。
公司主营业务为氟基新材料、新能源材料、电子信息材料和新能源电池,产品广泛应用于半导体集成电路、电动
汽车、电解铝、核工业、医疗等领域。
公司秉承“氟通四海、锂行天下、硅达五洲、硼程万里、智创未来”的发展使命,立志做全球氟材料行业引领
者,不断探求氟在人类生活和工业应用中的无限可能,为推动新能源产业绿色发展、半导体高端新材料国产化贡献智
慧。
氟通四海 锂行天下 硅达五洲 硼程万里 智创未来
氟通四海 锂行天下 硅达五洲 硼程万里 智创未来




